HEATING JACKETS
Bring thermal efficiency to
your gas and exhaust lines.
Your semiconductor gas, vacuum, and exhaust lines need heating and insulation that suit your application. Glass-fiber heating jackets offer options for operating temperatures up to 300°C, insulation thickness, and temperature control, so you can match the setup to your process requirements and pipe layout.
Your requirements guide the configuration, from individual jacket control to centralized monitoring. On-site assessment, measurement, technical consultation, and installation support help you work through the details of your setup.
THE TRUE COST OF THERMAL INEFFICIENCY
Repeatable layers, run after run. Compatible with EVATEC, AMAT, ANELVA, SPTS, UNAXIS and other major PVD platforms.
PIPE
CLOGGING
Cold spots can allow
by-products to accumulate inside your lines.
PARTICLE
CONTAMINATION
Accumulated deposits can become a source of particle contamination.
CONTINUOUS
HEAT LOSS
Insufficient insulation allows heat to escape throughout operation.
CORROSION
HAZARDS
Condensates can expose pipes and fittings to corrosive substances.
UNPLANNED
DOWNTIME
Clogged or damaged
lines can require cleaning or replacement.
The math nobody wants to do:
hundreds of metres of heated lines × 8,760 h/year × inefficient insulation = significant hidden cost.
WHAT YOU GAIN
Every jacket built for your pipes, your temperatures and your uptime.
PROCESS
CONTROL
Set temperatures by
jacket or group, with monitoring options
for your setup.
HEAT
PROTECTION
Insulation limits heat transfer. Dual thermal switches protect
against overheating.
ENERGY
SAVING
26 mm insulation with
an aerogel blanket
reduces heat loss
during operation.
MADE
TO FIT
Jacket dimensions, insulation, and power density matched to
your requirements.
LONGER
LIFETIME
Twisted heating
elements and power
cable protection help prevent damage.
TECHNICAL FEATURES
Glass-fiber heating jackets, configurations to match your operating requirements.
Operating temperatures: 40°C to 300°C, depending on configuration
Pipe sizes: ¼” to 12″
Safety: thermocouple, 2 × thermal switches, non-flammable materials
Controller types: individual, HMI, or PID
Insulation: 13 mm (regular) or 26 mm (energy saving)
Supply: single-phase or three-phase
Signal output: 24 VDC, dry contact or none · 1- or 3-phase supply
STRUCTURE THAT SUPPORTS YOUR SYSTEM
A glass-fiber inner cloth, heating layer, and insulation with an aerogel blanket, finished with a PTFE-coated glass-fiber outer cloth.
ONE HEATED LINE,
FROM TOOL TO SCRUBBER
Each section has its own heating requirements, including the clamps and connections where cold spots can form.
CONTROL THAT FITS YOUR SETUP
Individual jacket settings or channel-based control, with status feedback to suit your requirements.
INDIVIDUAL SYSTEM
- Plug-and-play, individual temperature control
- Self-regulating with LED status
- Maximum input current: 3 A
HMI SYSTEM
- Central touchscreen for up to 200 jackets
- Individual temperatures, alarms,
status monitoring
- For temperature-regulated jackets
PID SYSTEM
- Multiple jackets per channel,
max. 10 A/channel
- One sensor/channel, basic LED status
- Control box sized to the required
channel count
ADD REAL-TIME MONITORING WITH MACHINE PULSE
Combine with heating jackets to monitor outer temperatures at a glance.
ON-SITE INSTALLATIONS:
NOT JUST JACKETS
THE WHOLE PROJECT, TAKEN CARE OF
Your project starts with a discussion of your requirements and an on-site assessment. From measurement and
drawings to configuration, installation, and ongoing support, you have a team to work through the details with you.
