AIF SHOWER HEAD

Is your CVD process often stopped because of particle contamination?

Does your showerhead lifetime drastically drop, due to haunting issues?

Are you confronting with accumulated fluorine and corroded pin holes?

AIF Shower head issues after long time exposure under hard process circumstances

Implantation 10-700 microns. (No new layer is added).

Pinhole effect

Uniformity of the surface thickness

Corrosion protection from process gases (F, Cl, O2) and chemicals

Double lifetime (Plasma resistance/chemical resistance)

Dry etch rate increased 3 times

Less abradable surface

Plug and play (no process change)

Yield Improvement (less arcs, no cracks, less particles)

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