AIF SHOWER HEAD
Is your CVD process often stopped because of particle contamination?
Does your showerhead lifetime drastically drop, due to haunting issues?
Are you confronting with accumulated fluorine and corroded pin holes?
AIF Shower head issues after long time exposure under hard process circumstances
AIF SHOWER HEAD ADVANTAGES
- Uniformity of the surface thickness
- Corrosion protection from process gases (F, Cl, O2) and chemicals
- Double lifetime (Plasma resistance/chemical resistance)
- Dry etch rate increased 3 times
- Less abradable surface
- Plug and play (no process change)
- Yield Improvement (less arcs, no cracks, less particles)
Let's comunicate!
For all the further information please contact Philipp Quaderer via mail: philipp@spm.li or via Phone: +4237928027.