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N2 INJECTION SYSTEM

Optimize your suction force and prevent clogging of exhaust lines

Are you facing problems with clogged forelines and exhaust lines?

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Would you like to decrease maintenance at your vacuum lines and extend the time between PMs?

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You will be able to achieve this with the hot N2 injection system.

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The Hot N2 injection system size is identical to your pipe size. Horizontal N2 flow has no gas resistance on the way and no chance to swirl.

 

Advantages:

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  • No more clogging in the exhaust line

  • Suction force reduces the pump load

  • Increase the MTBC of exhaust

  • Reduces pump electrical power consumption

POSITIVE REFERENCES FROM OUR CUSTOMERS

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Photos before and after installation of the N2 injection system on the CVD tool after 60 days

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Photos before and after N2 injection system installation on Diffusion tool after 13 days

Keyboard and Mouse

Let's comunicate!

For all the further information please contact Philipp Quaderer via mail: philipp@spm.li or via Phone: +4237928027.

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