Optical Parts for Steppers

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All-optical parts you find at SPM enable you to reduce your cost. Not only you save money buying the products low priced, but you also can use them longer in your process. Due to a special manufacturing process, the life cycle of the optical components is enhanced and hence reduces your demand for replacement. 

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SPM offers amongst others the following optical components for stepper:

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·        I-line filters (Main, Sub)

·        G-line filters

·        Interference Filter (Main, Sub)

·        Cower glass (Lower, Upper)

·        Collector lens unit

·        Uniformity Filter

·        Cold mirror TTLA/FRA

·        Wedge Glasses,...