PHOTOCHUCKS
You want to upgrade your tool with the best possible photochuck available on the market?
Lithotools are the most capital-intensive tools in a semiconductor fab. Next to the optics, the Chuck itself can influence the yield and cost of ownership in a significant way.
Your process and tool have the potential to run even smoother with optimized photochucks for next-generation lithography wafer-handling applications.
Anti-warp photochuck for superior clamping force
Improved edge area defocus photochucks
You will be able to:
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decrease backside particles for sensitive applications, due to lower contact ration (small pin size and wider pitch)
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higher edge yield, due to improved edge cell flatness and wider vacuum area
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performing durability of the initial flatness and yield improvement, due to superior surface roughness
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lower overlay value with superior global flatness and wider/stronger vacuum
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improve hardness and bending strength, with converting material from Quartz/Si-SiC TO SiC
Technical capabilities OEM vs SPM modified photochuck
Pine size OEM vs SPM modified photochuck
Provided local cell flatness on edge(20X20) under 0.15um whereas OEM 0.5um
