STEPPER PARTS REPAIR
Have the most quality products and service for your lithography equipment
Are you paying enormous amounts to buy new lasers for your lithography tools?
Would you like to repair your lasers and use them at a similar time as new ones?
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We can support you with laser repair, electronic device refurbishments, and spare parts for your steppers.
Your laser will be handled with technicians that can diagnose laser repair issues, provide the right solution for you and repair it with the highest possible precaution. In each laser, all critical parts will be replaced, and this is a key secret for a laser longer lifetime. After each stepper parts repair, you will be provided with a laser diagnosis and status after repair.
Green and red laser
LS Relay AMP and ZT Realy AMP lasers
High Encoder Resolution board version 1, 2, 3
HP 5517 series
Yaskawa robot repair
Zygo laser series
(ZYGO 7701,7702 / 7712)
Excel 1001 Series
ADVANTAGES
Cost-efficient in
comparison with
buying a new laser​
Longer lifetime, due to complete replacement of all critical parts inside the lasers and electronic devices​
Over 80 repaired lasers
unit in 12 major
European fabs​
Proven lifetime: over 4 years in the tool
and still running
After repair laser failure diagnose and status after the repair is provided to you
Expedited shipping
in case of tools down